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IEEE Spectrum
January 2012
Katie M. Palmer
EUV Faces Its Most Critical Test 2012 will be the make-or-break year for extreme ultraviolet lithography mark for My Articles similar articles
InternetNews
January 26, 2004
Michael Singer
Intel Puts Chip Making Technique on the Fast Track Chip making giant's $20 million investment in Cymer's extreme ultraviolet lithography could help bring sub-45 nanometer chips to market earlier than first thought. mark for My Articles similar articles
InternetNews
February 21, 2006
Clint Boulton
IBM Chip Path to Cheat Moore's Law? In the search for new chip form factors to carry the torch that is Moore's Law, IBM researchers this week said they have found a way to build smaller chip circuits. mark for My Articles similar articles
IEEE Spectrum
March 2008
Saswato R. Das
A New Light Source for EUV Lithography Extreme ultraviolet laser offers a new route to next-gen chips. mark for My Articles similar articles